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SM1391 Datasheet, Silicon Microstructures

SM1391 sensor equivalent, gauge and differential pressure sensor.

SM1391 Avg. rating / M : 1.0 rating-11

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SM1391 Datasheet

Features and benefits


* 15 psi gauge, differential or asymmetric differential outputs
* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS
* 16-bit digital, pressure calibra.

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SM1391 Page 1 SM1391 Page 2 SM1391 Page 3

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